Fig. 2: Implementation of BSPM.
From: Binary-state scanning probe microscopy for parallel imaging
a Schematic illustration depicting the function of the metal-coated elastomer tip. b Scanning electron microscopy (SEM) image of the metal-coated elastomer tip. The inset shows the magnified image of the apex of a tip (scale bar: 2 μm). c SEM image and line profile of the test sample for the point measurement. d Raw data of the point measurement. The red and blue axes show the voltage of the tip and the scanning distance of the piezo actuator, respectively. The circled number indicates the corresponding situation of the tip depicted in Supplementary Fig. 3. Topography image (e) and line profile (f) of the 16 Ă— 16-μm2 square patterns with a thickness of 600 nm measured by BSPM. The inset in e shows the 2D mapping of the topography (scale bar: 20 μm). g Conceptual illustration showing the spatial resolution of the piezo actuator and the temporal resolution of the tip. h Topography of the multilayer graphene sheet measured by BSPM. The inset shows the same region measured by AFM. i Line profiles of the multilayer graphene sheet indicated in h.
