Fig. 4: Parallelization of BSPM.
From: Binary-state scanning probe microscopy for parallel imaging
a SEM image of the 2 × 2 metal-coated elastomer tip array. b Schematic illustration and graphs depicting the parallelized measurement using a multiple probe array. c Topography images of the square patterns with a thickness of 138 nm obtained through parallelized measurement using the 2 × 2 tip array. d Deviation of the 2 × 2 tip array. xy- and z-deviations indicate the deviation in the position and the height of the tip, respectively. e Schematic illustration of parallel imaging with the overlapped scanning area. f Parallelized BSPM measurement of the Siemens star test chart using the 2 × 2 tip array.
