Fig. 1: Integrated Pockels modulator in SiC on insulator.
a Overview of the fabricated ring modulator showing compatibility with CMOS voltages. b False color SEM of the microring waveguide and modulator electrodes. c False color SEM cross-section of the active region of the modulator. d Simulated static electric field and optical mode of the active region of the modulator. e SEM of an etched waveguide with the sidewall shown. f Measured optical spectrum of the SiC microring resonator after calibrating the optical loss from the VGCs. g Lorentz fit of the resonance line shape to determine the intrinsic optical quality factor (QI) (Cross: Measurement; Solid line: Lorentz fitting).
