Fig. 3: Frequency-agile tuning with integrated AlN piezoactuator. | Nature Communications

Fig. 3: Frequency-agile tuning with integrated AlN piezoactuator.

From: Low-noise frequency-agile photonic integrated lasers for coherent ranging

Fig. 3

a Experimental setup for heterodyne beat note characterisation of the frequency-agile hybrid-integrated laser. A continuous-wave (CW) external-cavity diode laser is used as a reference, and the beatnote is recorded on a fast oscilloscope (DSO) and analysed with short-time Fourier transforms. b Frequency excursion (blue) and residual root-mean-square (RMS) nonlinearity (red) of triangular laser chirps. The AlN actuator is driven with a peak-to-peak amplitude of 150 V. c Piezo-voltage to laser frequency transduction is calculated from the harmonic spectral content of the laser frequency chirp and the best fitted perfect triangular frequency chirp (red). d Time-frequency spectrogram of the heterodyne beat-notes for different triangular chirp repetition frequencies. Bottom row: residual of least-squares fitting of the time-frequency traces with symmetric triangular chirp pattern. e Suppression of photonic chip mechanical resonances. Measured responses of the stress-optic actuation for 190.7 GHz FSR microresonator using disk-shaped piezoactuator with single actuation (grey), dual actuators with difference-actuation for a square Si3N4 chip (green), an apodized chip (red) and an apodized chip on a carbon tape (blue). Insets: three mechanical modes of regular Si3N4 chip (225 kHz, 490 kHz, 967 kHz) and apodized chip (1.69 MHz) simulated with FEM, eigenfrequencies denoted by the arrows with displacement amplitude profile visualisation. Lower left: photo of the apodized chip with the dual-actuator configuration, exact chip dimensions are provided in the SI. Experimental schematic for difference driving of dual actuator.

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