Fig. 1: Concept, structure and sensing performance of the RSHTS.
From: Finger-inspired rigid-soft hybrid tactile sensor with superior sensitivity at high frequency
a Illustration of human body and anatomical structure of finger. b Finger-inspired rigid-soft hybrid piezoelectric tactile sensor array. c Differences of piezoelectric film deformation and working mode between our tactile sensor and existing piezoelectric tactile sensors. The blue color indicates the stress distribution of piezoelectric film. d Photograph of a 3 × 3 fabricated RSHTS array. e Comparison of the sensitivity of our tactile sensor with existing piezoelectric tactile sensors.
