Fig. 5: Sensing performance of CMP films.

a, c The fluorescence intensity of TCz-CMP and TCzP-CMP films to K2CO3-treated DCP vapors (acid-free). b, d The quenching efficiency of TCz-CMP and TCzP-CMP films exposed to K2CO3-treated DCP vapors (acid-free); the inset is a photo of CMP films excited at 365 nm. e, g The fluorescence intensity of TCz-CMP and TCzP-CMP films to acid-containing DCP vapors. f, h The quenching efficiency of TCz-CMP and TCzP-CMP films exposed to acid-containing DCP vapors. i, j Response time of TCz-CMP and TCzP-CMP films to acid-containing DCP vapors. k, l The recovery test of TCz-CMP and TCzP-CMP films to acid-containing DCP vapors (Solid arrow: the quenched process of CMP films by 50 mL 30 ppm DCP vapors; dash arrow: the recovery process of CMP films by injecting 50 mL 10% ammonia). Among them, the thickness of TCz-CMP and TCzP-CMP films are 45 nm and 250 nm, respectively. Error bars stand for standard deviation (n = 3).