Fig. 6: Device design and testing.

a The internal structure diagram of the portable detection system. b Schematic diagram of the circuit of the detection system. c Fluorescence signal data output by the portable detection system, the abscissa is the sensing unit numbers, and the ordinate is the corresponding fluorescence intensity. d The quenching efficiency of TCzP-CMP films to DCP vapors (acid-containing) in the portable detection system (the data output are obtained after the integral area is normalized by the instrument), 3σ is three times standard deviation. Among them, the thickness of TCzP-CMP films is 250 nm.