Fig. 1: Concept and realization of configuration-designable nanoscale 3D fabrication.

a The overall scheme of 3D fabrication including design and manufacturing steps. b Detailed fabrication process of 3D fabrication: Target material deposition, treatment with O₂ plasma, preparation of micropatterned elastomer mold, spin-coating of the thin adhesive layer, application of pre-strain to the substrate, nanotransfer printing, and pre-strain release. c-i Side-view scanning electron microscopy image of a buckled nanoline array with a linewidth of 200 nm and a thickness of 80 nm; the inset shows the corresponding large-area bird’s-eye view image. c-ii Confocal laser scanning microscopy image of nanoline arrays with buckling modes 2 and 3 featuring a linewidth of 800 nm and a thickness of 100 nm. c-iii Colored scanning electron microscopy image of a buckled serpentine array with a linewidth of 600 nm and a thickness of 100 nm.