Fig. 8: Frequency tuning for the micro-ring sensor array with 15 micro-rings.

a Resonant frequencies of the micro-ring sensors after frequency tuning, which are ordered and equally spaced with respect to their labeling. b The quality factors of these micro-ring sensors after frequency tuning, exhibiting good consistency. c A typical transmission spectrum of the micro-ring sensor array after frequency tuning, exhibiting 15 discrete resonant dips.