Fig. 4: Structure tolerance.
From: 400nm ultra-broadband gratings for near-single-cycle 100 Petawatt lasers

Dependence of the diffraction spectrum on (a) line density, (b) duty cycle, (c) shape factor, and (d) depth of the ultra-broadband grating. The wavelength range of light is 0.7–1.2 μm at 50° with TM polarization.