Fig. 3: PFM switching spectroscopy at a fixed location on a W/HZO/W capacitor as a function of the ac cycling process.
From: Electrically induced cancellation and inversion of piezoelectricity in ferroelectric Hf0.5Zr0.5O2
a–f Bias-off piezoresponse loops in the pristine state (a), after 25 cycles (b), 100 cycles (c), 500 cycles (d), 1000 cycles (e), and 5000 cycles of ac cycling (f), respectively. The piezoresponse loops were obtained by convoluting the PFM amplitude signal with the cosine of the PFM phase signal. g Local PFM amplitude evolution as a function of the number of ac cycles at two different locations of a capacitor (the bias-off PFM amplitude and phase loops are shown in Fig. S3 of the Supplementary Information).
