Fig. 2: BF-TEM images of diamond samples irradiated with 9 MeV C602+ ions to fluences of 5 × 1010 or 1 × 1011 C60 cm−2.
Top-view images of irradiated diamond are shown with tilting angles of a 0° and b 30° from the surface normal. The C60 ion irradiations were performed with an incident angle of 7° from the surface normal. Side-view images of ion tracks in c low-, d medium-, and e high-magnifications. Thick black layers in c–e are deposited Pt films as surface markers. In d, many protrusions are observed at the protection-layer side of the surface maker. While the observed protrusions are made of Pt, the origin of the protrusions can be the hillocks on the diamond surface, made by the ion tracks. e shows an expanded image of two tracks. All the images a–e were recorded at the over-focus condition.
