Fig. 4: Electromechanical characterization of the haptic device.
From: Crystallization of piezoceramic films on glass via flash lamp annealing
a Schematic of the device made of the flash lamp annealed 1 µm-thick PZT on AF32 glass. Two sets of interdigitated Pt electrodes are placed on top to create the actuators. Inset shows its visual appearance. b Out-of-plane displacement of the surface measured as a function of frequency at one of the antinodes. 60 Vpp (30 VAC + 30 VDC) were applied. c The displacement along x-axis (length of the device) excited at various driving voltages. d 2D map of the displacement at 60 Vpp. c and d are measured at the resonance frequency of 40.2 kHz.
