Fig. 2: Effect of microcone structure on response-relaxation time.

a Geometric parameters of the microcone. b Simulated energy loss versus pressure of microcones with various heights H. c Contour plot of critical buckling pressure of 20 microcones. d Simulated energy loss versus pressure of microcones with various bonded areas A. e Normalized capacitance change versus pressure of microcones with various bonded areas. The dotted data are experimental results. f Contour plot of normalized energy loss of 20 microcones. g SEM of microcone arrays with different bonding ratios. h Response-relaxation time of microcones arrays with different bonding ratios. Error bars represent the standard deviation of three repeated measurements of the time.