Fig. 3: Fabrication of plasmonic nanoparticles-in-cavity microfilter array.
From: Miniature computational spectrometer with a plasmonic nanoparticles-in-cavity microfilter array
a Schematics of fabrication processes: (i) sputtering of Ag/SiO2 layers; (ii) spin coating of TiO2 nanolayer; (iii) direct printing of size-controlled AgNPs; (iv) grayscale patterning of polymer FP cavities; (v) sputtering of Ag/SiO2 layers. b SEM images of printed AgNPs. c SEM images of the cross-sections of the fabricated polymer thickness-tuned FP microcavities. d Transmissive optical images of the fabricated plasmonic microfilter array: (i) the whole sample image with 1152 microfilters; (ii-v) partially enlarged images of eight microfilters.
