Fig. 4: Autonomous self-healing dielectric and transistor.

a Current density versus electrical field plots of the self-healing dielectric in MIM structure. b C–V performance of the self-healing dielectric at different frequencies. c C–F performance of a biaxially stretched dielectric at 0 V. d Capacitance and dielectric constant of a self-healing dielectric in its pristine and healed (3 μm cutting width) states. e Transfer characteristics for 25 devices of a self-healing transistor. The black line and blue dots show the drain and gate currents, respectively. f Mobility change under uniaxial and biaxial strain of the self-healing transistor. g Transfer characteristics and (h), mobility change of nine devices in the damaged, healing (24 h), and healed (48 h) states. All error bars were calculated using a sample in each of three batches (n = 3).