Fig. 1: Experimental setup.

a Conceptual illustration of a surface trap with ions and integrated beams. b SEM image of the trapping region of the micro-fabricated surface trap, consisting of multi-color waveguide output couplers (oval structures within RF rails), electrodes (green) and RF rails (blue). Single photon avalanche diodes (SPADs) are located at the center of trapping sites and are shielded by a grounded metal mesh to protect the ion from electric field perturbations when the SPADs are operational (see Methods). c SEM image for an MMI splitter that routes light to waveguide output couplers (indicated in blue and dark blue). Similar splitters are also applied for other colors. d SEM image of grating output couplers. e ¹⁷¹Yb⁺ energy level diagram, indicating the three different integrated wavelengths used in the experiment.