Table 1 Structural parameters of the ZnO resonant nano-accelerometer
From: A zinc oxide resonant nano-accelerometer with ultra-high sensitivity
Dimension | Value |
|---|---|
Length of ZnO nanobeam | 50 μm |
Diameter of ZnO nanobeam | 550 nm |
Proof mass | 9.287 μg |
Pivot beam (length × width) | 30 × 3 μm |
Width of microleverage | 8 μm |
Width of output beam | 5 μm |
Support beam (length × width) | 100 × 55 μm |
Notched flexure (length × width) | 3 × 2 μm |
