Fig. 1: Cancellation-free MIM with monolithic silicon cantilever probes.
Design of conventional MIM (a) and this work (b). Components removed in our architecture are shaded red. LNA low-noise microwave amplifier, SL stripline, SMC solid metal cantilever, TF tuning fork. c Implementation of our design. MW microwave, LIA lock-in amplifier. d Details of the probe and impedance matching network attached to the atomic force microscope (AFM) head. DC direct current, RF radio frequency. Inset probe mounting details and scanning electron micrograph of the Si probe25. e The custom printed circuit board integrating the active mixer and INAs. f ∣S11∣ spectrum of the Si probe impedance matched by a half-wave resonator. Source data are provided as a Source Data file.
