Fig. 5: Enhanced spatial resolution through harmonic demodulation. | Nature Communications

Fig. 5: Enhanced spatial resolution through harmonic demodulation.

From: Johnson-noise-limited cancellation-free microwave impedance microscopy with monolithic silicon cantilever probes

Fig. 5

a MIM spectrum with Pin = − 10 dBm over a wider frequency range, showing dynamic MIM signal at harmonics of f0. b–d Raw MIM-Im image demodulated at f0, 2f0, and 3f0, respectively. e–g Line profiles along the dashed line in the images with a zoomed-in view across the Al/SiO2 edge for 3f0 accompanied by the corresponding topography. The yellow arrows indicate the disappearance of the “halo" artifact. Source data are provided as a Source Data file.

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