Table 1 Performance metric for TEM with Cricket
From: Fast imaging of millimeter-scale areas with beam deflection transmission electron microscopy
imaging parameters | avg. 3 nm/pix (120 ms exp.) | avg. 3 nm/pix (40 ms exp.) | peak 3 nm/pix (40 ms exp.) | avg. 3.6 nm/pix (40 ms exp.) | unit |
|---|---|---|---|---|---|
x,y pixel size* | 3 | 3 | 3 | 3.6 | nm/pixel |
tile size (per size) | 6000 | 6000 | 6000 | 6000 | pix |
FOV size | 18 | 18 | 18 | 21.6 | μm |
pixels per tile | 36 | 36 | 36 | 36 | Mpixel |
supertile size (per side, 15% overlap b/w tiles) | 16200 | 16200 | 16200 | 16200 | pix |
overlap between supertiles | 600 | 600 | 600 | 600 | pix |
exposure time (exp.) | 120 | 40 | 40 | 40 | ms |
tiles per section (w/overlap) | 4356 | 4356 | 4140 | 2916 | tile |
supertiles per section (w/overlap) | 484 | 484 | 460 | 324 | supertile |
imaging time per section | 11.7 | 6.6 | 4.7 | 4 | minute |
transition overhead (tape translation, ROI definition, autofocus, etc.) | 2.2 | 2.2 | 1.8 | 2.2 | minute |
total time per section | 13.9 | 8.8 | 6.5 | 6.2 | minute |
burst imaging rate (imaging only) | 300 | 900 | 900 | 900 | Mpix/s |
montage imaging rate (w/ stage, Cricket) | 223 | 397 | 529 | 437 | Mpix/s |
net imaging rate (w/ stage, Cricket, transition) | 188 | 297 | 382 | 282 | Mpix/s |
effective imaging rate (w/ stage, Cricket, transition, overlap) | 142 | 224 | 288 | 213 | Mpix/s |
sections per day (1 scope at 24 h) | 103 | 163 | 221 | 232 | section |
time to image 1 mm³ (4 scopes at 24/7) | 54 | 35 | 26 | 24 | days |
time to image 1 mm³ (4 scopes at 65% uptime #) | 83 | 53 | 39 | 37 | days |
