Fig. 3: Electrical characteristics of IGZO-VFETs with different channel length.
From: Large-scale sub-5-nm vertical transistors by van der Waals integration
a Optical and corresponding AFM images of IGZO/graphene with various IGZO thickness, the scale bar for optical images is 10 μm, for AFM images is 3 μm. b Optical image of VFETs with channel lengths of 4 nm. c, d, Ids-Vgs transfer curves of VFETs with channel length of 10 nm (c) and 4 nm (d).
