Fig. 3: The role of the graphene layer and blistering behavior during the ablation process.

a Ablation mechanism of the conventional LLO method, and (b) the resulting blister shape with high height and low diameter. The sharp blister introduces high mechanical strain. c The role of the graphene layer during the ablation process of the GLLO method, and (d) the resulting blister shape with low height and high diameter. The smooth blister enables the reduction of mechanical strain. e, f Measured (e) height and (f) diameter of blisters with respect to the laser fluence and the number of graphene layers. Error bars represent standard deviations obtained from samples (n = 7). g The representative images of blisters at the laser fluence of 110.9 and 79.2 mJ/cm² (scale factor: 120). The shape and dimension of the blisters were experimentally measured using confocal microscopy.