Fig. 1: Conceptual illustration of the spectrometer.

a Schematic of the MEMS-enabled computational spectrometer (MECS) featuring a waveguide coupler reconfigured by an integrated electrostatic MEMS cantilever actuator. A spectrum is coupled into the MECS chip for analysis. b Interferogram obtained at the MECS output port without denoising. c Spectrum reconstruction result without denoising. d Architecture of the convolutional autoencoder denoising (CAED) mechanism used for interferogram denoising. e Interferogram with CAED. f Spectrum reconstruction result with CAED.