Fig. 1: Growth of HACNT arrays through the nano-seeding method. | Nature Communications

Fig. 1: Growth of HACNT arrays through the nano-seeding method.

From: Nano-seeding catalysts for high-density arrays of horizontally aligned carbon nanotubes with wafer-scale uniformity

Fig. 1

a Schematic of the nano-seeding method: the precise loading of catalyst precursors by ion implantation, the physical confining of catalyst nanoparticles by substrate processing, and the uniform growth of HACNT arrays by VSCVD system. b Photograph of a one-inch HACNT-array wafer. c Raman line mapping spectra (at 532 nm excitation) of the arrays, inset is a typical SEM image. d AFM height image of the HACNT arrays showing the local highest density of 140 tubes μm−1. e Cross-sectional TEM images of HACNT arrays. f Polarized Raman spectra of HACNT arrays. The polarization angle of the incident light was systematically altered by rotating a half-wave plate (λ/2) during the measurement process. Inset: Polar plot of Raman intensity as a function of polarization angle. The red dots are the measured Raman intensity of G bands. The blue line is the fitting curve. g Zoom-in SEM image of the HACNT arrays. Source data are provided as a Source Data file.

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