Fig. 2: Design of the switch based on split waveguide crossings.
From: Silicon photonic MEMS switches based on split waveguide crossings
Simulated light propagation diagrams with transmission spectra of the switch in the OFF state (a, b) and ON state (c, d), respectively. The inset of a and c shows the close-up view around the reflecting facets. Schematic diagram of the structural aligner, folded spring (e), and electrostatic comb (f). g Simulated electrostatic force arisen by different voltage and corresponding displacement of the movable mechanical structures. h Displacement of the movable mechanical structures in the ON state.
