Fig. 3: Fabrication and measurement results of the device.
From: Silicon photonic MEMS switches based on split waveguide crossings
a Perspective scanning electron microscope (SEM) image of the fabricated device. Stationary and movable halves of the split waveguide crossing are highlighted with red and blue, respectively. b A close-up view of the reflecting facets and mechanical stopper. Period and depth of the subwavelength-teeth were measured. c, d Transmission T11 and T12 in the OFF and ON state, respectively. e Transmission T12 with different actuation voltages. The threshold voltage is measured to be 20 V and the maximum drive voltage rating is beyond 30 V. f Temporal response of the switch. g Durability test of the switch. The switch was turned on and off for over 1 billion times and the optical transmission T12 at 1550 nm was recorded.
