Table 2 The performance of mechanical resonators in optomechanical (OM) and electromechanical (EM) devices
Material | Bandgap isolation | Structure | Frequency | Q factor | Total linewidth | Pure dephasing | Group delay | Ground-state | Coherence time |
|---|---|---|---|---|---|---|---|---|---|
Al-stairs-drum98 | no | stairs-circular plate (EM) | 2π ⋅ 10.69 MHz | 3.6 × 105 | 2π ⋅ 30 Hz | not report | ~5 ms | yes | 130 μs |
Al-flat-drum134 | no | flat circular plate (EM) | 2π ⋅ 1.8 MHz | 1.6 × 107 | 2π ⋅ 0.135 Hz | 2π ⋅ 0.09 Hz | not report | yes | 7.7 ms |
SiN99 | no | double clamped beam (EM) | 2π ⋅ 1.45 MHz | 6 × 105 | 2π ⋅ 14.5 Hz | not report | 3.4 ms | no | not report |
SiN90 | yes | phononic crystal beam (EM) | 2π ⋅ 4.48 MHz | 5.6 × 105 | 2π ⋅ 8 Hz | not report | 19.9 ms | yes | not report |
SiN92 | yes | Lotus membrane (EM) | 2π ⋅ 1.48 MHz | 5.7 × 108 | 2π ⋅ 2.6 mHz | 2π ⋅ 0.5 mHz | not report | yes | ~100 ms |
no | square membrane (EM) | 2π ⋅ 750 kHz | 7.8 × 107 | 2π ⋅ 9.7 mHz | not report | ~ 500 s | yes | 55.7 μs | |
SiN78 | yes | Honeycomb lattice (OM) | 2π ⋅ 2.4 MHz | 108 | 2π ⋅ 24 mHz | not report | 23 ms | no | 100 μs |
crystalline silicon77 | yes | phononic crystal beam (OM) | 2π ⋅ 5 GHz | ~4.09 × 106 | 2π ⋅ 1.22 kHz | 2π ⋅ 1.219 kHz | not report | yes | 130 μs |
crystalline silicon93 | yes | phononic crystal beam (EM) | 2π ⋅ 5.08 GHz | ~2 × 105 | 2π ⋅ 31.8 kHz | 2π ⋅ 30 kHz | not report | yes | 5 μs |
crystalline silicon136 | yes | phononic crystal beam (OM) | 2π ⋅ 5.12 GHz | ~2.58 × 106 | 2π ⋅ 1.98 kHz | 2π ⋅ 1.42 kHz | not report | yes | ≤112μs |
gallium phosphide (GaP)65 | yes | phononic crystal beam (OM) | 2π ⋅ 2.81 GHz | 4 × 104 | 2π ⋅ 67 kHz | 2π ⋅ 64.5 kHz | not report | yes | 2.37 μs |
gallium arsenide (GaAs)140 | no | phononic crystal beam (OM) | 2π ⋅ 2.7 GHz | 1.8 × 104 | 2π ⋅ 179 kHz | not report | not report | yes | 0.8 μs |
aluminum nitride (AlN)141 | no | microdisk (OM) | 2π ⋅ 0.78 GHz | 3.86 × 103 | 2π ⋅ 202 kHz | not report | 0.76 μs | no | not report |
lithium niobate (LiNbO3)142 | yes | phononic crystal beam (OM) | 2π ⋅ 2.1 GHz | 1.7 × 104 | 2π ⋅ 123 kHz | not report | not report | no | not report |
crystalline diamond100 | no | microdisk (OM) | 2π ⋅ 2.14 GHz | 1.12 × 104 | 2π ⋅ 190 kHz | not report | ~5ms | no | not report |
3C-SiC143 | no | microdisk (OM) | 2π ⋅ 579 MHz | 5.3 × 103 | 2π ⋅ 108 kHz | not report | not report | no | not report |
no | nanowire (OM) | 2π ⋅ 50 kHz | 103 | 2π ⋅ 50 Hz | not clear | not report | no | not report | |
4H-SiC147 | yes | microdisk (OM) | 2π ⋅ 6.2 MHz | 2.8 × 106 | 2π ⋅ 2.21 Hz | not report | not report | no | not report |
3C-SiC [this work] | no | square membrane (EM) | 2π ⋅ 871 kHz mode (1,3) | 1.2 × 108 | 2π ⋅ 8.2 mHz | 2π ⋅ 0.28 mHz | 4035 s | yes | 41.3 ms |
3C-SiC [this work] | no | square membrane (EM) | 2π ⋅ 1.178 MHz mode (3,3) | 2 × 108 | 2π ⋅ 6.04 mHz | 2π ⋅ 0.25 mHz | >5000 s | yes | 67.75 ms |
