Table 1 Geometric parameters of the seven optimized designs of axially symmetric polymer structures resulting from the optimization for the different target angles (λ0 = 1.55 μm)
θ−1 | Λ [μm] | r0 [μm] | w [μm] | h [μm] | N | ηsim (θ−1) | ηexp (θ−1) |
---|---|---|---|---|---|---|---|
20° | 4.4 | 3 | 2.2 | 1.1 | 4 | 3.8% | 3.6% |
30° | 3 | 2 | 1.5 | 1.5 | 5 | 2.6% | 2% |
40° | 2.41 | 1.5 | 1.21 | 1.69 | 5 | 2.2% | 1.4% |
50° | 2.05 | 1.2 | 1.03 | 1.44 | 5 | 1.4% | 1% |
60° | 1.78 | 1.1 | 0.89 | 1.25 | 6 | 1% | 0.6% |
70° | 1.65 | 1.05 | 0.83 | 1.15 | 6 | 0.9% | 0.25% |
80° | 1.54 | 0.95 | 0.77 | 1.23 | 6 | 0.7% | 0.075% (0.1% at 75°) |