Fig. 3: Preparation and characterization of the quasi-three-dimensional subwavelength structure.
From: Perfect anomalous refraction metasurfaces empowered half-space optical beam scanning

a Scanning electron microscopy top-view image of the quasi-three-dimensional subwavelength structure sample. b Scanning electron microscopy side-view image of the quasi-three-dimensional subwavelength structure sample. c Far-field scattered light from all angles of the sample. The scattered field predominantly exhibits +1st-order diffraction, indicating high-efficiency anomalous refraction. d Broadband anomalous refraction efficiency of the quasi-three-dimensional subwavelength structure sample. The colored band represents the test error bar. The experimental standard deviations of the anomalous refraction efficiencies are 6.7% at 1350 nm and 7.6% at 1550 nm.