Fig. 4: Microstructural analysis and elemental mappings of phase change memory (PCM) cells under various RESET pulses and cycling conditions.
From: Extended switching endurance of phase change memory through nano-confined cell structure
a The cross-sectional transmission electron microscopy (TEM) images of PCM cells programmed with RESET pulse A for (I) 103, (II) 104, (III) 105, (IV) 106, (V) 107, and (VI) 108 cycles. b The cross-sectional TEM images of PCM cells programmed with RESET pulse G for (I) 103, (II) 104, (III) 105, (IV) 106, (V) 107, (VI) 108, (VII) 109, and (VIII) 1010 cycles. The corresponding cross-sectional dark-field scanning transmission electron microscopy images of PCM cells programmed with c RESET pulse A and d RESET pulse G where the core volume is marked by orange circles. e The carbon atom distribution in the phase change layer, though electron energy loss spectroscopy (EELS) analysis with focus on (I) the active volume. The carbon segregation revealed by EELS mapping for the PCM cells programmed by RESET pulse A for (II) 107 and (III) 108 cycles and by RESET pulse G for (IV) 107, (V) 108, (VI) 109, and (VII) 1010 cycles. The energy dispersive x-ray spectroscopy mapping of the PCM cells programmed by RESET pulse G for (f ) 109 and (g) 1010 cycles where the core volume is outlined by orange circles.
