Fig. 1: Releasable PhCC pixels for mechanical transfer. | Nature Communications

Fig. 1: Releasable PhCC pixels for mechanical transfer.

From: Transfer printing micro-assembly of silicon photonic crystal cavity arrays: beating the fabrication tolerance limit

Fig. 1

a Schematic of a PhCC pixel on its donor substrate and after transfer to a receiver substrate with silica support frame. b SEM image of fabricated PhCC pixels on the donor substrate, where the right hand pixel has been transferred, leaving a void in the donor array. c High magnification SEM image of the PhCC central region showing the L3 cavity geometry and (d) optical microscope image of a silicon PhCC printed onto a silica support frame.

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