Fig. 5: 3D TXM-XANES and SXDM for chemical state and strain distribution.

a–c The 3D TXM-XANES mapping (a) and cross-sectional views (b, c) of SC81-prisitne. d Statistic distribution based on whiteline peak position. e–g The 3D TXM-XANES mapping (e) and cross-sectional views (f, g) of SC81-air. h The calculated standard deviation of the whiteline peak position in statistic based on (d). i, j XRF image (i) and SXDM image (j) of SC81-pristine. k, l XRF image (k) and SXDM image (l) of SC81-air. m The strain distribution profile. n, o The corresponding integration of unstrained (n) and strained parts (o), respectively.