Fig. 5: Hysteretic deformation of silicon nano-kirigami.
From: Silicon nano-kirigami with controlled plastic, elastic and hysteretic deformations
a Side-view SEM image of a planar spring structure with size of 9.0 × 9.0 µm2 after wet etching. Scale bar: 1 µm. b Schematic illustration of the charge distribution within the structure during electrical tuning. c Top-view microscope images of the four distinctive states of the planar spring during the charge and discharge process. The four states are I: Initial state; II: Voltage-on state; III: Instant rebound state (swiftly returning to the flat state after cutting off the supplied voltage); and IV: Re-collapsed state following the instant rebound state. d Side-view schematic images of corresponding four states in (c). e Relative light intensity (defined as I/I0) versus time when the voltage is turned on and off at 140 V and λ = 950 nm. f Modulation contrast versus time [corresponding to the enlarged time period of the dashed rectangle in (e)] when different DC voltages are applied as noted. The light blue and blue regions denote the period when the voltage is turned off at 0 s, showing clear hysteretic effects.
