Fig. 2: Fabrication and chiroptical response of nano-cilia structures.
From: Dynamic optical chirality based on liquid-crystal-embedded nano-cilia photonic structures
a The preparation process of nano-cilia metasurface. The nano-cilia structure is realized by a nano-kirigami process: a high dose focused ion beam (FIB) is used for film cutting, and then a low dose global ion beam (GIB) is used for structure twisting. b Schematic of nano-cilia units. The units are designed with a periodicity of p = 500 nm, a central cylinder radius with r = 130 nm, and an arm width of w = 60 nm. c, d Side-view SEM images of 2D and 3D state of nano-cilia metasurface. Scale bars: 500 nm. e Experimental vertical displacement of the nano-cilia as a function of ion dose. Error bars represent standard deviation (SD) of three independent experiments (n = 3). f SEM images of nano-cilia metasurface with different displacement. Scale bar: 500 nm. The initial and final images are top views, and the intermediate images are oblique views with an angle of 52°. g Calculated CD spectra of 3D deformed RH/LH-cilia. h, i Experimental transmission and CD spectra of 3D deformed RH/LH-cilia under LCP and RCP excitation.
