Fig. 3: The experimentally fabricated Si3N4 metalens with NA  =  0.155. | Nature Communications

Fig. 3: The experimentally fabricated Si3N4 metalens with NA  =  0.155.

From: On-chip integration of achromatic metalens arrays

Fig. 3

a, b are the top-view SEM images of achromatic metalens with different resolutions. Different types of meta-units can be clearly identified. c The corresponding tilt-view SEM image of the metalens. d, e are the intensity profiles of focal spots in x-z plane and x-y planes at different wavelengths. The white dashed line depicts the numerical focal length. The bottom panels depict the normalized intensity profiles along the diameter. The intensity profiles have the same scale bar.

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