Fig. 1: Memristive device for operando transmission electron microscopy (TEM). | Nature Communications

Fig. 1: Memristive device for operando transmission electron microscopy (TEM).

From: Unraveling the dynamics of conductive filaments in MoS2-based memristors by operando transmission electron microscopy

Fig. 1

a Design of the lateral memristor based on MoS2. The MoS2 was first transferred to the Si/SiO2 substrate, followed by electrode deposition (Pd, Ag, and Al, ~50 nm thick). The MoS2 channel between Pd and Ag/Al (outlined by the thick quadrilateral) is approximately 1–2 µm in the x direction. Additionally, ~80 nm thick Al2O3 was deposited onto the channel. b Top-view scanning electron microscopy (SEM) image of the lateral device. c, d Schematic of the TEM holder and a closeup around the Au tip/FIB lamella contact. The Au tip is grounded and mobile, while the lamella is attached to the fixed TEM grid, through which external biasing can be applied. e High-angle annular dark-field (HAADF) image showing the lamella and the operando setup inside the TEM. f, g HAADF image and the corresponding composite map of Pd, S, and Ag based on energy-dispersive X-ray spectroscopy (EDXS) elemental mapping showing the channel region in (e). h, i HAADF images showing the cross-section of transferred MoS2.

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