Fig. 3: Light irradiation repairs the surface of aged sapphire.

a Schematic showing ultraviolet (UV) light-irradiation-induced surface repair. b XPS analysis of sapphire after UV light exposure and after subsequent pre-growth heating process. The reduced full width at half maximum (FMHM) values of Al2p and O1s peaks after heating under growth conditions indicated that the sapphire appears to have reverted to a structure similar to that of freshly annealed sapphire during the pre-growth process. c The reflection high-energy electron diffraction (RHEED) patterns of aged and repaired sapphires. d The RHEED intensity profiles recorded along the dotted lines in c.