Fig. 5: Frequency scaling trend of micro/nanomechanical resonators (published works are dated by their publication dates; this work is dated by its submission date). | Nature Communications

Fig. 5: Frequency scaling trend of micro/nanomechanical resonators (published works are dated by their publication dates; this work is dated by its submission date).

From: Towards terahertz nanomechanics

Fig. 5

The mechanical platforms are categorized as follows: beam41,42,43,44,45,46, thin-film bulk acoustic resonator (FBAR)47,48,49,50, surface acoustic wave (SAW) resonator51,52,53,54,55, optomechanical crystal (OMC)56,57,58,59,60,61,62, Lamb-wave resonator (LWR)26,27,28,29,63,64,65. The blue dashed reference line marks the THz frequency threshold (300 GHz).

Back to article page