Table 1 Correction precision and number of iterations required for convergence for individually corrected aberrations
Corrected aberration | Precision of HfO2 measurement (nm) | Convergence iteration for HfO2 | Precision of Au NP measurement (nm) | Convergence iteration for Au NP |
|---|---|---|---|---|
C1 | 0.29 | 8 | 1.25 | 8 |
A1 | 1.18 | 24 | 0.17 | 13 |
B2 | 16.18 | 25 | 15.04 | 9 |
A2 | 24.27 | 31 | 40.14 | 9 |
