Table 3 Precision of C1-A1-B2-A2 aberration correction

From: BEACON—automated aberration correction for scanning transmission electron microscopy using Bayesian optimization

Corrected aberration

Precision for HfO2 (nm)

Precision for Au NPs (nm)

C1-A1-B2-A2

C1: 4.44, A1: 1.17, B2: 20.66, A2: 19.97

C1: 5.10, A1: 9.36, B2: 107.10, A2: 147.98

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