Table 2 Fine particle density values, d (particles/mm²), measured in two sample holders exposed near the Return Grid Sensor Housing (RGHS) and one sample holder on the European Physiology modules Facility (EPM) front panel, on three different coatings (FDTS, SiOCH, Parylene).
RGHS | RGHS | EPM | <d> | |
---|---|---|---|---|
FDTS | 1.43 | 8.35 | 4 ± 1.91 | 4.45 ± 3.07 |
SiOCH | 2.18 | 1.07 | 5.98 ± 1.94 | 3.80 ± 2.79 |
Parylene | 3.45 | 5.98 | 2.02 ± 0.49 | 3.37 ± 1.89 |
<d> | 2.36 ± 1.02 | 5.13 ± 3.72 | 4 ± 1.98 |