Table 1 Design parameters of capacitive seesaw-like mesostructures fabricated by the mechanics-guided assembly.
From: Tunable seesaw-like 3D capacitive sensor for force and acceleration sensing
L (mm) | t (μm) | Ws (μm) | Ls (mm) | Lm (mm) | Wm (mm) | Lb (mm) |
|---|---|---|---|---|---|---|
8.3 | 75 | 350 | 1.5 | 3 | 4 | 1.15 |
