Fig. 2: Crystalline structure of epitaxial freestanding SRO films grown with different sacrificial layers.

a Comparative lattice constants (Å) of the pseudocubic SRO, sacrificial layers (i.e., SAO and CSAO) and STO substrate. b XRD 2θ-ω scans of the strained and freestanding SRO films with the SAO (top) and CSAO (bottom). c Interplanar distance d of the strained and freestanding [001]-, [110]- and [111]-oriented SRO films grown on STO, SAO/STO (blue), and CSAO/STO (red). d–f Reciprocal space maps around the (103) and (013) peaks for the (d) [001]-oriented SRO films grown on STO substrate, [001]-oriented freestanding SRO films grown with (e) SAO and (f) CSAO. S-SRO, S-SROSAO, and S-SROCSAO represent the strained SRO without sacrificial layer, with SAO and CSAO buffer layers. F-SROSAO and F-SROCSAO represent the freestanding SRO grown with SAO and CSAO.