Fig. 3: Illustrations of fabricated flexible RF MEMS switch for characterization. | npj Flexible Electronics

Fig. 3: Illustrations of fabricated flexible RF MEMS switch for characterization.

From: Flexible radio-frequency micro electro-mechanical switch towards the applications of satellite communications

Fig. 3

a Optical microscope top view and oblique view of flexible RF MEMS switch. b Oblique view of 3D surface topography contour of flexible RF MEMS switch membrane beam. c Photograph of the flexible RF MEMS switch device bent on a curved surface. d Oblique view of 3D surface topography contour of flexible RF MEMS switch in membrane beam driving state. (Membrane beam width: 20 μm).

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