Table 1 Summary of reported performance of printed and vacuum-deposited ultrathin indium tin oxide (ITO) as a function of thickness and annealing temperature
From: Kinetic liquid metal synthesis of flexible 2D conductive oxides for multimodal wearable sensing
Reference | Deposition System | Thickness, nm | Conductivity, S/cm | Annealing Temperature, °C | |
|---|---|---|---|---|---|
This Work | Liquid Metal Printing | 6 | 1340 | N/A | |
Pan et al.37 | Inkjet Printing | 60 | 440 | 500 | |
Scheideler et al.38 | Gravure Printing | 150 | 500 | 400 | |
Serkov et al.39 | Gravure Printing | 400 | 500 | Laser Annealed | |
Kwok et al.28 | Pulsed Laser Deposition | 6 | 830 | N/A | |
Gwamuri et al40 | RF sputtering | 22 | 62 | 300 | |
Kim et al.41 | RF sputtering | 10 | 1400 | 240 | |
Qiao et al.30 | DC Sputtering | 20 | 12 | 300 | |
Chan et al.29 | DC Sputtering | 20 | 1488 | 400 | |
