Fig. 6: Experimental and simulated profiles of airbridge scaffolds.
From: Tantalum airbridges for scalable superconducting quantum processors
a Experimental profiles of airbridge scaffolds for etching and lift-off methods. b Simulated profiles of scaffold for etching and lift-off methods. c Experimental profiles of airbridge scaffold for grayscale lithography method. Notice that curves in (a), (b), and (c) have been shifted for clarity and the length of the airbridges are also marked beside each curves. d The height of the airbridges versus the length for both experimental and simulation data.
