Extended Data Fig. 1: Segmental Bi2O2Se/Bi2SeO5 GAA heterostructure and corresponding strain mapping. | Nature Materials

Extended Data Fig. 1: Segmental Bi2O2Se/Bi2SeO5 GAA heterostructure and corresponding strain mapping.

From: Low-power 2D gate-all-around logics via epitaxial monolithic 3D integration

Extended Data Fig. 1

a, Tilted-view SEM image of segmental Bi2O2Se/Bi2SeO5 GAA heterostructure, in which the Bi2SeO5 shell was selectively etched away while remaining the intact Bi2O2Se core. b, the cross-section STEM image of the side part of the 2D Bi2O2Se/Bi2SeO5 GAAFETs. c, strain mapping across the x axis (ɛxx). d, strain mapping across the x axis (ɛyy).

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