Extended Data Fig. 1: Fabrication of the on-chip platform. | Nature Nanotechnology

Extended Data Fig. 1: Fabrication of the on-chip platform.

From: Vacuum levitation and motion control on chip

Extended Data Fig. 1

a) The substrate is made of silicon covered with a layer of silicon oxide to isolate the substrate from the electrodes. The electrodes are made of gold, and a titanium layer is used to increase the adhesion of the electrodes to the silicon oxide. The fibre mounts are fabricated directly onto the silicon. b) Summarized fabrication process: 1. We start from a silicon wafer with a layer of silicon oxide. 2. The titanium and the gold are evaporated on the wafer. 3. The gold and the titanium are etched to create the electrodes. 4. The silicon oxide is etched to created the clearance for the fibre mounts. 5. After dicing the wafer, the fibre mounts are printed onto the silicon via two-photon polymerization. c) Fibre mounts used to align the fibres in our chip. The width of the square slot accommodating the fibre is chosen to be slightly smaller than the cladding of the single mode fibres.

Back to article page