Extended Data Fig. 6: Surface defects of nLEDs according to their fabrication steps. | Nature

Extended Data Fig. 6: Surface defects of nLEDs according to their fabrication steps.

From: Highly efficient blue InGaN nanoscale light-emitting diodes

Extended Data Fig. 6

a, Optical micrographs of the nLEDs dispersed on Si substrates. b, Ga 3d state ratios estimated using XPS. Fitting of XPS core-level spectra of dry-etched nanorods for Ga 3d (c) and N 1s (d). XPS core-level spectra for Si 2p (e), O 1s (f) and C 1s (g).

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